Document Type

Patent

Publication Date

February 2014

Patent Number

8642123

Abstract

Provided herein is a method for the synthesis and the integration of ZnO nanowires and nanocrystalline diamond as a novel hybrid material useful in next generation MEMS/NEMS devices. As diamond can provide a highly stable surface for applications in the harsh environments, realization of such hybrid structures may prove to be very fruitful. The ZnO nanowires on NCD were synthesized by thermal evaporation technique.

Application Number

12/780,566

Assignees

University of South Florida

Filing Date

05/14/2010

Primary/U.S. Class

427/227

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