Document Type

Patent

Publication Date

2-23-2016

Patent Number

9267822

CPC

G01D 5/38 (20130101)

Abstract

In some embodiments, a system for evaluating coupled components includes a first diffraction grating provided on a first component, a second diffraction grating provided on a second component, a light source that emits light having a wavelength that is larger than the grating periods of the first and second diffraction gratings, and a photodetector that senses the intensity of the light after it passes through the diffraction gratings.

Application Number

13/784,191

Assignees

University of South Florida

Filing Date

2013-03-04

Share

COinS