Document Type
Patent
Publication Date
August 2006
Patent Number
7095484
Abstract
A method and apparatus to create two dimensional and three dimensional structures using a maskless photolithography system that is semi-automated, directly reconfigurable, and does not require masks, templates or stencils to create each of the planes or layers on a multi layer two-dimensional or three dimensional structure. In an embodiment, the pattern generator comprises a micromirror array wherein the positioning of the mirrors in the micromirror array and the time duration of exposure can be modulated to produce gray scale patterns to photoform layers of continuously variable thickness. The desired pattern can be designed and stored using conventional computer aided drawing techniques and can be used to control the positioning of the individual mirrors in the micromirror array to reflect the corresponding desired pattern. A fixture for mounting of the substrate can be incorporated and can allow the substrate to be moved three dimensions. The fixture can be rotated in one, two, or three directions.
Application Number
10/408,696
Recommended Citation
Fries, David P., "Method and apparatus for maskless photolithography" (2006). USF Patents. 661.
https://digitalcommons.usf.edu/usf_patents/661
Assignees
University of South Florida
Filing Date
04/07/2003
Primary/U.S. Class
355/67
