Document Type
Patent
Publication Date
October 2015
Patent Number
9160305
CPC
H03H 9/542(20130101), H03H 3/04(20130101)
Abstract
In one embodiment, a hybrid micromechanical resonator includes a capacitive resonator element and a piezoelectric resonator element, wherein the resonator can be capacitively and piezoelectrically transduced.
Application Number
14/050,860
Recommended Citation
Wu, I-Tsang; Dewdney, Julio Mario; and Wang, Jing, "Capacitively and piezoelectrically transduced micromechanical resonators" (2015). USF Patents. 63.
https://digitalcommons.usf.edu/usf_patents/63
Assignees
University of South Florida
Filing Date
10/10/2013
COinS
