Document Type
Patent
Publication Date
April 2007
Patent Number
7201485
Abstract
The present invention includes a novel method to fabricate corner cube retroreflectors, CCRs, where a majority of the wafer area acts as CCRs as compared to a maximum of 33% in previous MEMS CCRs. The present invention also allows for the fabrication of moveable cantilevers which operate at one-third the voltage as compared to a conventional planar cantilever.
Application Number
10/710,983
Recommended Citation
Agarwal, Rahul; Bhansali, Shekhar; Onishi, Shinzo; and Samson, Scott, "Corner cube retroreflector" (2007). USF Patents. 625.
https://digitalcommons.usf.edu/usf_patents/625
Assignees
University of South Florida
Filing Date
08/16/2004
Primary/U.S. Class
359/529
COinS
