Document Type
Patent
Publication Date
November 2008
Patent Number
7456638
Abstract
A MEMS-based silicon CTD sensor for ocean environment is presented. The sensor components are a capacitive conductivity sensor, a gold doped silicon temperature sensor, and a multiple diapghram piezoresistive pressure sensor. The sensor elements have further been packaged to protect them from harsh marine environment. The sensor components showed good linear response, resolution and mechanical integrity to the harsh ocean environment.
Application Number
11/379,270
Recommended Citation
Bhansali, Shekhar; Langebrake, Lawrence C.; and Bhat, Shreyas, "MEMS based conductivity-temperature-depth sensor for harsh oceanic environment" (2008). USF Patents. 615.
https://digitalcommons.usf.edu/usf_patents/615
Assignees
University of South Florida
Filing Date
04/19/2006
Primary/U.S. Class
324/693
