Document Type
Patent
Publication Date
May 2010
Patent Number
7718461
Abstract
The present invention describes nano-scale fabrication technique used to create a sub-micron wide gap across the center conductor of a coplanar waveguide transmission line configured in a fixed-fixed beam arrangement, resulting in a pair of opposing cantilever beams that comprise an electro-mechanical switch. Accordingly, a nanometer-scale mechanical switch with very high switching speed and low actuation voltage has been developed. This switch is intended primarily for application in the RF/microwave/wireless industry.
Application Number
12/266,845
Recommended Citation
Weller, Thomas and Ketterl, Thomas, "Nanometer-scale electromechanical switch and fabrication process" (2010). USF Patents. 486.
https://digitalcommons.usf.edu/usf_patents/486
Assignees
University of South Florida
Filing Date
11/07/2008
Primary/U.S. Class
438/59
