Document Type
Patent
Publication Date
April 2010
Patent Number
7700911
Abstract
A cylindrical ion trap (CIT) mass spectrometer constructed using a non-conductive substrate (LTCC) as the basis for the ring electrode. Photolithography and electroless plating were used to create well-defined conductive areas on the LTCC ring electrode. The inventive method allows for the precise control of establishing conductive areas on a non-conductive substrate through the steps of punching, lamination, firing, metallization and photolithography on the metallized layer.
Application Number
11/368,770
Recommended Citation
van Amerom, Friso; Chaudhary, Ashish; Bhansali, Shekhar; Short, Robert T.; and Steimle, George, "Fabrication of 3-D ion optics assemblies by metallization of non-conductive substrates" (2010). USF Patents. 478.
https://digitalcommons.usf.edu/usf_patents/478
Assignees
University of South Florida
Filing Date
03/06/2006
Primary/U.S. Class
250/281
