Document Type
Patent
Publication Date
September 2012
Patent Number
8269974
Abstract
The device is a gas/vapor/aerosol/particulate sensor with a receiver/transmitter option. This optical MEMS device is designed to be a self-contained optical bench, integrating of an entire interferometer into a MOEMS ‘optical bench’ system-on-a-chip, and includes multiplexed optical path sensors. The sensing structures consist of laser sources, semiconductor photo detectors, refractive/reflective optical elements, and specialized optical transmission paths. Each individual laser source and photodiode is an optical path sensor with a particular ‘functionalization.’ These sensing arm functionalizations are sensitive to unique chemical signatures and as a result can recognize and report various chemical agents present in the ambient environment.
Application Number
12/488,982
Recommended Citation
Ash, III, William M., "Interferometric chemical sensor array" (2012). USF Patents. 353.
https://digitalcommons.usf.edu/usf_patents/353
Assignees
University of South Florida
Filing Date
06/22/2009
Primary/U.S. Class
356/451
