Document Type
Patent
Publication Date
August 2012
Patent Number
8236108
Abstract
An inertial masking assembly that allows multiple thin film structures to be deposited on a single substrate by rotation of a shadow mask relative to the substrate. The assembly rotates the position of the shadow mask by the conservation of momentum. The substrate is seated on means for rotating the substrate in a confined orbit within the mask. Abruptly changing the angular velocity of the mask causes the mask to rotate under the substrate, which is mediated by a combination of friction and the substrate's inertia.
Application Number
12/430,327
Recommended Citation
Miller, Casey W., "Inertial masking assembly" (2012). USF Patents. 342.
https://digitalcommons.usf.edu/usf_patents/342
Assignees
University of South Florida
Filing Date
04/27/2009
Primary/U.S. Class
118/721