Document Type
Patent
Publication Date
January 2012
Patent Number
8089196
Abstract
Shear-horizontal surface acoustic wave sensors with micro-cavities in the delay paths were studied using finite element methods. The microcavity devices are SAW delay path devices that have the delay path etched with square patterns at various wavelength dimensions and varying depths to increase the dispersion and bulk to surface wave conversion. Additionally the microcavities are filed with polystyrene to act as an inhomogeneous waveguide for further entrapment of wave energy near the device surface. The effects of micro-cavities and grooves on SAW propagation show significantly greater energy transmission than the other structures presented traditional sensors.
Application Number
12/398,746
Recommended Citation
Cular, Stefan and Bhethanabotla, Venkat R., "Microcavity enhanced surface acoustic wave devices" (2012). USF Patents. 288.
https://digitalcommons.usf.edu/usf_patents/288
Assignees
University of South Florida
Filing Date
03/05/2009
Primary/U.S. Class
310/313
