Document Type

Article

Publication Date

December 2023

Patent Number

11843364

CPC

H03H 9/171 , H03H 9/02338 , H03H 9/02228 , H03H 9/02275 , H03H 9/175 , H03H 9/02448 , H03H 9/02102 , H03H 9/13

Abstract

An acoustic resonator includes a piezoelectric stack including a piezoelectric layer having a top surface and a bottom surface, a top electrode layer disposed above the top surface, and a bottom electrode layer disposed below the bottom surface. A number of acoustic wave reflectors are disposed on a side of the bottom electrode layer opposite the piezoelectric layer. Each acoustic wave reflector includes a high acoustic impedance layer and may include a low acoustic impedance layer. The acoustic resonator may include a tether that extends laterally to a stacking direction of the layers of the piezoelectric stack. A supporting structure may be coupled to the tether opposite the acoustic resonator for anchoring the acoustic resonator. A mirror, one or more phononic crystals, or both may be positioned on proximate the tether opposite the acoustic resonator to avoid resonant waves from exiting the acoustic resonator in use.

Application Number

17/535868

Assignees

II-VI DELAWARE, INC.

Filing Date

11/26/2021

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