Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling

Author

Jorge C. Lallave-Cortes, University of South Florida

Graduation Year

2009

Document Type

Dissertation

Degree

Ph.D.

Degree Granting Department

Mechanical Engineering

Major Professor

Muhammad M. Rahman, Ph.D.

Co-Major Professor

Ashok Kumar, Ph.D.

Keywords

Steady state, Transient analysis, Conjugate heat transfer with spinning boundaries, Slurry abrasive particles, CMP temperature distributions

Scholar Commons Citation

Lallave-Cortes, Jorge C., "Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling" (2009). USF Tampa Graduate Theses and Dissertations.
https://digitalcommons.usf.edu/etd/2054