Numerical Heat Transfer During Partially–confined, Confined, and Free Liquid Jet Impingement with Rotation and Chemical Mechanical Planarization Process Modeling

Author

Jorge C. Lallave-Cortes, University of South Florida

Graduation Year

2009

Document Type

Dissertation

Degree

Ph.D.

Degree Granting Department

Mechanical Engineering

Major Professor

Muhammad M. Rahman, Ph.D.

Co-Major Professor

Ashok Kumar, Ph.D.

Committee Member

Aydin K. Sunol, Ph.D.

Committee Member

Craig P. Lusk, Ph.D.

Committee Member

Garrett Matthews, Ph.D.

Keywords

steady–state, transient analysis, conjugate heat transfer with spinning boundaries, slurry abrasive particles, and CMP temperature distributions

Scholar Commons Citation

Lallave-Cortes, Jorge C., "Numerical Heat Transfer During Partially–confined, Confined, and Free Liquid Jet Impingement with Rotation and Chemical Mechanical Planarization Process Modeling" (2009). USF Tampa Graduate Theses and Dissertations.
https://digitalcommons.usf.edu/etd/2054