A MEMS-based silicon pressure sensor for the ocean environment is presented. The invention is a multiple diaphragm piezoresistive pressure sensor for measuring the pressure of a liquid, comprising an inner deformable diaphragm formed on a silicon substrate, the inner deformable diaphragm having a first thickness an outer deformable diaphragm formed on the silicon substrate, the outer deformable diaphragm having a second thickness which is greater than the first thickness, positioned below the inner deformable diaphragm to support the inner deformable diaphragm, a first piezoresistive bridge embedded in the inner deformable diaphragm, a second piezoresistive bridge embedded in the outer deformable diaphragm and possibly a third piezoresistive bridge embedded in the silicon substrate to compensate for temperature variations.
Bhansali, Shekhar; Langebrake, Lawrence C.; and Bhat, Shreyas, "Reinforced piezoresistive pressure sensor" (2010). USF Patents. 544.
University of South Florida