Document Type
Event
Keywords
SU-8, micromanipulation, polymer microgripper, piezoelectric.
Description
In this work, we present the development process of SU-8 polymer based microgrippers applied to novel parallel displacement geometry and assembly techniques. Finite element based simulations were utilized to determine the geometry dimensions, and to verify its operation. Two actuation techniques, mechanical, and piezoelectric are implemented, and characterized. The fabrication process requires a single mask, and it is described along with the assembly process required to implement the actuator-microgripper system. Experimental results are presented for both actuation techniques, along with failure analysis. The microgrippers are designed to manipulate microstructures in the range of 5 to 50μm.
DOI
https://doi.org/10.5038/DRUJ6356
Design, Fabrication, and Characterization of a Microgripper Device
In this work, we present the development process of SU-8 polymer based microgrippers applied to novel parallel displacement geometry and assembly techniques. Finite element based simulations were utilized to determine the geometry dimensions, and to verify its operation. Two actuation techniques, mechanical, and piezoelectric are implemented, and characterized. The fabrication process requires a single mask, and it is described along with the assembly process required to implement the actuator-microgripper system. Experimental results are presented for both actuation techniques, along with failure analysis. The microgrippers are designed to manipulate microstructures in the range of 5 to 50μm.