Graduation Year


Document Type




Degree Granting Department

Mechanical Engineering

Major Professor

Ashok Kumar, Ph.D.

Committee Member

Frank Pyrtle, III, Ph.D.

Committee Member

Muhammad Rahman, Ph.D.


Pulsed laser deposition, Chemical vapor deposition, Stress, Friction coefficient, Nanoindentation


Diamond and diamond-like carbon films, with their exceptionally good mechanical, chemical, and optical properties, are the best materials as protective hard coatings for electronic devices and cutting tools. The biocompatibility of these materials makes it suitable for bone implants. The wide range applications of these films are hindered because of the high compressive stresses developed during the deposition. Use of carbide and nitride interfacial layers has emerged as one of the methods to reduce the compressive stresses.

The present research focuses on the study of different materials as the interfacial layers for diamond and tetrahedral amorphous carbon films. For tetrahedral amorphous carbon AlN, Ta, TiN, TiC, TaN and W were investigated as the interlayer materials. The interlayer was deposited at different substrate temperatures to study the temperature induced changes in the residual stress. The tetrahedral amorphous carbon with TiN interlayer deposited at 300ºC and 600ºC exhibited a maximum reduction in the stress. vii TiN and TiC were deposited as interlayer for the diamond films on Ti-6Al-4V alloy. TiC has improved the adhesion of diamond with the substrate and exhibited less compressive stresses compared to TiN.