Graduation Year
2023
Document Type
Thesis
Degree
M.S.C.H.
Degree Name
MS in Chemical Engineering (M.S.C.H.)
Degree Granting Department
Chemical Engineering
Major Professor
Venkat R. Bhethanabotla, Ph.D.
Co-Major Professor
John N. Kuhn, Ph.D.
Committee Member
Vinay Gupta, Ph.D.
Abstract
Liquid Atomic layer deposition (LALD) is an emergent technology used for depositing thin films. Extensive research has been done on this method, designing different techniques and modifications for the deposition of films. Wastage of alkoxide precursors, extra purging cycle, and extensive time for the reaction when added stoichiometrically are some of the drawbacks which shift the focus from metal alkoxide as precursors. In this thesis, modifications for the L-ALD method for the complete reaction of alkoxide precursors when added stoichiometrically were achieved. Temperature and catalyst’s synergistic effects were utilized for the modification. This modified method was applied for the doping of lanthanum on alumina spheres to synthesize lanthanum aluminate. The performance of the perovskite was tested using the methane coupling reaction.
Scholar Commons Citation
Singh, Prabhsimran, "Synergistic Effect of Temperature and Acid Catalyst to Enhance L-ALD" (2023). USF Tampa Graduate Theses and Dissertations.
https://digitalcommons.usf.edu/etd/10455
