Document Type
Patent
Publication Date
September 2008
Patent Number
7425276
Abstract
The present invention provides for a method for the fabrication of microchannels, and more particularly to the fabrication of microchannels for use in Microelectromechanical (MEMS) devices and MEMS related devices. In accordance with an embodiment of the present invention, microchannels are formed by a microfabrication method utilizing electronic imaging techniques in combination with chemical etching and subsequent metallization. The method of the present invention is effective in producing networks of channels in liquid crystal polymer (LCP) polymeric substrates which are highly defined in terms of their patterns, and thus are able to encompass a wide variety of end uses.
Application Number
11/160,613
Recommended Citation
Fries, David P.; Steimle, George; and Broadbent, Heather, "Method for etching microchannel networks within liquid crystal polymer substrates" (2008). USF Patents. 607.
https://digitalcommons.usf.edu/usf_patents/607
Assignees
University of South Florida
Filing Date
06/30/2005
Primary/U.S. Class
216/23
