A cylindrical ion trap (CIT) mass spectrometer constructed using a non-conductive substrate (LTCC) as the basis for the ring electrode. Photolithography and electroless plating were used to create well-defined conductive areas on the LTCC ring electrode. The inventive method allows for the precise control of establishing conductive areas on a non-conductive substrate through the steps of punching, lamination, firing, metallization and photolithography on the metallized layer.
van Amerom, Friso; Chaudhary, Ashish; Bhansali, Shekhar; Short, Robert T.; and Steimle, George, "Fabrication of 3-D ion optics assemblies by metallization of non-conductive substrates" (2010). USF Patents. 478.
University of South Florida