Document Type

Patent

Publication Date

July 2012

Patent Number

8215171

Abstract

A ring electrode design that produces a uniform mass sensitivity distribution across a TSM device is presented. A new technique and apparatus to measure this mass sensitivity distribution is also presented. Novel electrode geometries on thickness shear mode (TSM) quartz resonators achieve radial uniformity of mass sensitivity, how receptive the device is to mass loadings, and high frequency stability across the active sensing area of the sensor device. The device allows for absolute mass measurement down to the nanogram level. Fabricated devices utilizing model predictions were tested using this apparatus, and good agreement between theory and experiment is found.

Application Number

12/547,976

Assignees

University of South Florida

Filing Date

08/26/2009

Primary/U.S. Class

73/80

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